| Document available to download | Size (kB) |
| Other documents (Available after expression of interest) |
| Agreement - DRAFT.docx |
| Appendix 1 Requirement specification - A.xlsx |
| Appendix 2 - Prices.docx |
| Appendix 3 - Si DRIE - Process and wafer description.pdf |
| Appendix 4 - Solemn Declaration regarding Russia.docx |
| Appendix A - Consortium declaration.docx |
| Appendix B - Letter of support.docx |
| INSTRUCTIONS TO TENDERERS - Open Procedure.pdf |