| Document available to download | Size (kB) |
| Other documents (Available after expression of interest) |
| Agreement - DRAFT.docx |
| Appendix 1 - Requirement specification.xlsx |
| Appendix 2 - Prices.dotm |
| Appendix 3 - Si DRIE - Process and wafer description.pdf |
| Appendix 4 - Solemn Declaration regarding Russia.dotx |
| Appendix A - Consortium Declaration.dotm |
| Appendix B - Letter of support.dotm |
| INSTRUCTIONS TO TENDERERS - Si DRIE Etcher - Open Procedure.pdf |