Servicios de suministros

Kontaktinformation

Navn, adresse og kontaktpunkter

Danmarks Tekniske Universitet - DTU
Anker Engelunds Vej 1
2800 Kgs. Lyngby DK

Telefon: +45 93511388

Internet adresse

Url: http://www.dtu.dk
E-mail: piabl@dtu.dk

Modtager

Pia Blume

Udbud information

Udbuds Id: 0277-372020
Titel: 9219 - Purchase of bench-top maskless aligner with two different UV exposure wavelengths
Dato for annoncering: 12-07-2024 19:00
Udbudstype: Udbud under tærskelværdierne

Udbudsform: Andre
Anmodningsfrist/tilbudsfrist: 22-07-2024 12:00

Tildelingskriterier: Pris

Kontrakt information

Kontrakt detaljer

Opgavetype: Varer
Beskrivelse af konktrakten:

DTU is planning to purchase a maskless UV aligner from Heidelberg Instruments Mikrotechnik GmbH, which fulfills the following specifications:

-	Maskless UV aligner enabling UV exposure of photoresist on carrier substrates with a maximum size of 150 mm x 150 mm
-	Raster scan mode exposure at high speed with a wavelength of 365 nm relevant for thick film photoresists such as SU-8 with a resolution down to 1 µm
-	Vector mode exposure with a wavelength of 405 nm with a resolution down to 1 µm
-	Bench-top equipment, with footprint area below 1 m2
-	x-y alignment to pre-existing structures with a precision of 1 µm
-	Pneumatic autofocus enabling exposure of photoresists deposited on transparent substrates

Reasons for the Direct Award:

The µMLA system from Heidelberg Instruments is a unique system that allows the illumination of photo resins on objects with a size of up to 150 mm x 150 mm with a resolution down to 1 µm. The unique thing about µMLA described here is that we get it delivered with 2 different UV wavelengths, 365 nm and 405 nm. It enables illumination of multi-material stacks with high precision and without the need for alignment when changing wavelength. We have been looking for such a system for several years and this is the first time we have identified any equipment that can meet our requirements while the machine is a bench-top system. As a special function, the system has the option of using pneumatic auto-focus, unlike optical auto-focus, it enables the illumination of resins deposited on transparent materials (glass/polymers).

Nuts

DK

Hovedgenstand

38000000

Yderligere genstand(e)

Kontrakt myndighed information

Myndighedstype: Andre

Navn, adresse og kontaktpunkter

Danmarks Tekniske Universitet - DTU
Anker Engelunds Vej 1
2800 Kgs. Lyngby DK

Telefon: +45 45252525

Internet adresse

Url: http://www.dtu.dk
E-mail: dtu@dk.dk

Kontaktperson

Beskrivelse: Pia Blume
Telefon: +45 93511388
E-mail: piabl@dtu.dk

Kontrakt forskellige informationer

Vedhæftede URL-adresser: http://eu.eu-supply.com/ctm/Supplier/PublicPurchase/408860